EECS 521: Solid State Devices

InstructorProfessor Wei Lu

This is a graduate level course aimed to provide students a comprehensive understanding of solid state electronic devices, emphasizing on the challenges facing CMOS scaling and possible solutions. The course covers fundamental advanced topics in MOSFET devices, nanoscale planar and non-planar silicon transistor structures, and some promising research device structures. 

Fundamentals of Modern VLSI Devices by Yuan Taur and Tak H. Ning
Cambridge University Press, 1st edition (October 13, 1998) ISBN: 0521559596


Lecture 1
(ITRS’s PIDS and ERD chapters, Intro to Nanoscale devices). Free electron model
Lecture 2
Electrons in solids.
Density of states, Fermi surfaces, tight-binding model, energy bands, carrier density, (notes)
Lecture 3
Energy bands.
Si and GaAs lattice and band structures, valley degeneracy, HH and LH bands (Waser 3, Davies 2)
Lecture 4
Scattering and mobility
Envelope function, doping, scattering time approximation, mobility, phonons, screening  (Waser 3, Davies 2)
Lecture 5
MOS capacitor
Surface potential, inversion, exact charge solutions. C-V, interface charges, intro to MOSFET (Taur 2.3)
Lecture 6
MOSFET devices
Drain-current model based on gradual channel approx, I-V characteristics, channel mobility (Taur 3)
Lecture 7
MOSFET, beyond long channel model 
Subthreshold region, Degradation of the effective mobility, finite inversion layer capacitance, Short-channel effects (DIBL and charge-sharing model) (Taur 1.2, 3.2, 2.4)
Lecture 8
High-field effects
Velocity saturation, impact ionization, LDD, band-to-band tunneling, GIDL, dielectric breakdown (Taur 2.4) New devices based on tunneling and impact ionization effects.
Lecture 9
Scaling rules and CMOS device design parameters
Scaling rules, threshold voltage design (Taur 4.2) 
Lecture 10
SOI devices 
Non-scaling factors, advantages of thin-body SOI electrostatics (Taur 4.1, 5.4, notes)
Lecture 11
Multiple-gate MOSFETs
Thin-body MOSFET carrier transport, double gate devices, GAA devices, parasite resistance (
Lecture 12
Strained Si technology and channel orientation
“Grand challenges” listed in ITRS, strained-Si technology, channel orientation
Lecture 13
Gate oxide and high-k
Reliability of thin SiO2, oxide breakdown, high-k dielectrics, metal gates 
Lecture 14
Process-induced variability 
Random dopant fluctuations, line edge roughness, metal grain granularity; associated variations in Vt and GIDL
Lecture 15
Interface effects
Band bending at the interface, interface and surface states, quantum effects in inversion layer
Lecture 16
Heterostructures and quantum confinement effects
Resonant tunneling devices (Shur 2.12), 3D, 2D, 1D structures, nanofabrication (reading)
Lecture 17
HEMT devices
Modulation doping, HEMT,
Lecture 18
Device Simulation
Partial differential equation solutions, Monte Carlo, Using Synopsis Sentaurus on CAEN
Lecture 19
Boltzmann Transport Equation
Boltzmann transport equation, approximations, applications and limitations
Lecture 20
Single electron devices
Coulomb blockade phenomena, Single electron transistors (Waser 16)
Lecture 21
Ballistic transistors
Ballistic transport, quantum “contact” resistance, properties of ballistic FET (notes)
Lectures 22
Graphene and other 2D material devices
Band structure (gapless semiconductor), transport properties and devices (Waser 9, notes)
Lecture 23
Memories 1
DRAM and scaling, Flash memory and scaling, 3D flash
Lecture 24
Emerging memory and architectures
Resistive memory and STT MRAM. Emerging memory and logic architectures (Waser 22, 23, 28, notes)
Lecture 25
BEOL and 3D integration
BEOL processes, TSV, chip-on-wafer, monolithic BEOL integration