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EECS 515: Integrated Microsystems

Instructor: Prof. Yogesh Gianchandani

Prerequisite: EECS 414. (4 credits)
Advanced micro electro mechanical systems (MEMS) devices and technologies. Transduction techniques,

Coverage
Review of interface electronics for sense and drive and their influence on device performance, interface standards, MEMS and circuit noise sources, packaging and assembly techniques, testing and calibration approaches and communication in integrated microsystems. Applications, including RF MEMS, optical MEMS, bioMEMS, and microfluidics. Design project using CAD and report preparation.