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Awards by Faculty

Mark Kushner

2018
College of Engineering
2018
von Engel and Franklin Prize
ICPIG (International Conference on Phenomena in Ionized Gases)
2017
IPCS (International Plasma Chemistry Society)
2016
University of Technology, Eindhoven
2016
American Physical Society, Division of Plasma Physics
2015
IEEE-Nuclear & Plasma Sciences Society
2011
AVS
2011
Fellow
IPCS (International Plasma Chemistry Society)
2011
NAE
2010
APS
2009
College of Engineering
2008
University Researcher Award
Semiconductor Industry Association
2001
Distinguished Lecturer
American Physical Society, Division of Plasma Physics
2000
Plasma Science and Applications Award
IEEE
1999
Fellow
AVS
1999
Plasma Science and Technology Prize
AVS
1998, 1997
Anderson Consulting Award for Excellence in Advising
University of Illinois
1997
Tegal Corporation Thinker Award for Plasma Processing Technology
Tegal Corporation
1997
Anderson Consulting Award for Excellence in Advising
University of Illinois
1995
Fellow
Japanese Society for Advancement of Science
1995
Technical Excellence Award
Semiconductor Research Corporation
1994
Anderson Consulting Award for Excellence in Advising
University of Illinois
1991
Fellow
IEEE
1991
Anderson Consulting Award for Excellence in Advising
University of Illinois
1991
Burlington Northern Faculty Achievement Award
University of Illinois
1991
T. Murphy University of Illinois Scholar
University of Illinois
1991
Xerox Senior Faculty Award
University of Illinois
1990
Fellow
APS
1990
Everitt Award for Undergraduate Instruction
University of Illinois
1988
Xerox Junior Faculty Award
University of Illinois
Fellow
Institute of Physics
Fellow
Intl. Union Pure & Applied Chemistry
Fellow
OSA