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Nanoimprint Technology and Its Applications

L. Jay Guo

Nanoimprint is an emerging nanolithographic technique capable of patterning sub-10nm features in large areas but with simple experimental setup. In this talk I will discuss its basic principle, material requirements, and considerations due to polymer flow issues in the nanoimprint process. I will also discuss some related techniques derived from nanoimprint that are suitable for patterning on flexible substrate, creating 3D structures and patterning functional polymers. Because of the high-throughput and high resolution capability provided by these techniques and their compatibility with polymer material processing, nanoimprint has found a wide range of applications, from electronics, photonics, data storage, to biotechnology. I will describe some of the applications in this talk.

L. Jay Guo received his Ph.D. from the University of Minnesota in 1997. He was a research associate at Princeton University from 1998-1999. He joined the University of Michigan, Ann Arbor in fall of 1999, and is currently an associate professor in the Department of Electrical Engineering and Computer Science. His research areas include nanofabrication technologies with applications in polymer photonic devices and biotechnologies; organic electronics, nanoimprint technology, and nanophotonics.

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Materials Science & Engineering