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Solid-State and Nanotechnology

Micro and Nano Machining for High Aspect Ratio Structures

February 28th 2012
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Micro and Nano Machining for High Aspect Ratio Structures
February 28, 2012
This is a one day workshop on micro and nano machining for high aspect ratio structures in glass, silicon, silicon carbide, PZT and other materials, held at the Lurie Nanofabrication Facility at the University of Michigan in Ann Arbor, MI.

The short course will include both classroom lectures and hands-on activities relevant to many different applications. Topics that will be covered include:
DRIE on Si, glass, other materials
Metrology and analysis of etched results
Design rules
Masking strategies: resists and others
Review of LNF capabilities
and much more!!!!
For more information:
Contact David Yates at LNF-info@umich.edu or 734-323-1432

Sponsored by

EECS