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Overview of MEMS and Microsystems at Sandia National Laboratories

Dr. Keith OrtizManager, MEMS Technologies DepartmentSandia National Laboratories

Students are encouraged to attend because Sandia is actively recruiting new graduates.
Sandia National Laboratories has conducted research and development in microelectromechanical systems (MEMS) and other microsystem technologies since the mid-1990's. It is well known for its surface micromachining capability, in particular, the SUMMiT VÂ, process with which it can make rotating gears and machines. This presentation will be a brief overview of current MEMS and microsystems R&D at Sandia and will highlight work in aluminum nitride inertial sensors and RF filters, microsystems-enabled photovoltaic cells, and other technologies.

Dr. Keith Ortiz is the manager of the MEMS Technologies Department within the Microsystems S&T and Components Center at Sandia National Laboratories. His department conducts research and development for advanced micro-electromechanical systems (MEMS) that push the technology envelope for national security applications. The department also develops and maintains a core set of MEMS fabrication processes.

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