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MEMS and Microsystems

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Graduate-level ECE courses related to this area (click the MM column to see Major area courses)
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This research area encompasses projects on a variety of micromachined sensors and actuators and on integrated microsystems that combine these components. Devices such as micromachined neural probes for implantable prostheses, ultra-miniature low-power pressure sensors for catheters, tactile sensors arrays for fingerprint analysis, infra-red imagers for manufacturing process control, and micro gas chromatography systems for environmental monitoring are some of the past contributions of this program. The scope of the current research efforts encompasses exploration of new materials, new device concepts, new fabrication methods, new interface circuits, and new microsystems.


  • Environmental Sensors
  • Implantable Devices
  • MEMS Technology and Packaging
  • Microfluidics and Gas/Chemical
  • Plasma Fabrication and Plasma Based MEMS Devices
  • Power Sources and Energy Harvesting

ECE Faculty

Ethem Erkan Aktakka


David Blaauw


Yu-Chih Chen

Jae Yoong Cho

Parag Deotare


Michael Flynn


Yogesh B. Gianchandani


Guohong He

Mark Kushner


Khalil Najafi


Becky (R.L.) Peterson


Yutao Qin

Kamal Sarabandi


John Seymour


Dennis Sylvester


Jong-Kwan Woo

Euisik Yoon


CSE Faculty

Kevin Fu


Affiliated Faculty

Cynthia Chestek


Katsuo Kurabayashi


Jerome Lynch

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