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This research area encompasses projects on a variety of micromachined sensors and actuators and on integrated microsystems that combine these components. Devices such as micromachined neural probes for implantable prostheses, ultra-miniature low-power pressure sensors for catheters, tactile sensors arrays for fingerprint analysis, infra-red imagers for manufacturing process control, and micro gas chromatography systems for environmental monitoring are some of the past contributions of this program. The scope of the current research efforts encompasses exploration of new materials, new device concepts, new fabrication methods, new interface circuits, and new microsystems.
- Environmental Sensors
- Implantable Devices
- MEMS Technology and Packaging
- Microfluidics and Gas/Chemical
- Plasma Fabrication and Plasma Based MEMS Devices
- Power Sources and Energy Harvesting
- RF MEMS
Yogesh B. GianchandaniWebsite
Becky (R.L.) PetersonWebsite
Olivia Lee awarded NSF Graduate Research Fellowship for brain-machine interfaces that could improve control of robotic prosthesesLee designs implantable and wearable electronics to help restore movement to those who have lost limbs or have been paralyzed.
Best paper for a low-power ADC circuit for brain-machine interface applicationsEuisik Yoon’s team, led by Sungjin Oh, developed a low-power neural recording front-end circuit to interface with state-of-the-art neural probes.
Next generation neural probe leads to expanded understanding of the brainThe hectoSTAR probe, with 128 stimulating micro-LEDs and 256 recording electrodes integrated in the same neural probe, was designed for some stellar brain mapping projects
Ester Bentley receives Impact award for her research with the goal of GPS-free navigationBentley presented her research as an NDSEG Fellow. She is working to make smaller, more affordable high accuracy navigation-grade gyroscopes.
New understanding of neurons in the hippocampus: they’re all the sameA longstanding collaboration between engineers and neuroscientists leads to new insights into how neurons work in the hippocampus.
Tracking Monarch Butterfly Migration with the World’s Smallest Computer
In a project funded by National Geographic, ECE researchers are teaming up with the department of Ecology and Evolutionary Biology to advance our understanding of monarch butterfly migration with the most ambitious iteration of the Michigan Micro Mote yet.
Detecting environmental pollutants with a smaller, portable, fully electric gas chromatograph
Prof. Yogesh Gianchandani and Dr. Yutao Qin received an “Outstanding Paper Award” for their fully electronic micro gas chromatography system.
Research on neural probe that sheds multicolor light on the complexities of the brain recognized for its impact
Prof. Euisik Yoon and his team are recognized for their work designing low-noise, multisite/multicolor optoelectrodes that will help neurologists learn more about neural connectivity in the brain.
Autonomous well monitoring solution recognized with a Best Innovators award
The WAND wireless sensor developed in a collaboration between Total, an oil & gas company, and the University of Michigan is revolutionizing well monitoring
Ester Bentley receives NDSEG Fellowship to help the world navigate without GPS
PhD student Ester Bentley designs smaller, better 3D mechanical resonators for use in high-performance gyroscopes to help unmanned systems navigate when GPS signal is jammed or lost.
New machine learning method improves testing of stem-like tumor cells for breast cancer research
To improve the prediction and identification of stem-like cancer cells, Prof. Euisik Yoon’s group developed a method that is 3.5 times faster than the standard approach.
Improved neural probe can pose precise questions without losing parts of the answers
It will now be possible to study brain activity when timing is important, such as the consolidation of memory.
Small, precise and affordable gyroscope for navigating without GPS
Accurate gyroscopes are a bottleneck for backup navigation systems in autonomous vehicles.
David Blaauw named Kensall D. Wise Collegiate Professor of Electrical Engineering and Computer Science
Blaauw’s innovations in low-power computing led to development of the Michigan Micro Mote, the world’s smallest computer.
Enabling large-scale testing of cancer drugs with machine learning
Prof. Euisik Yoon and his team developed a new machine learning tool that enables large-scale testing of cancer drug effectiveness with microfluidics.
Two ‘U’ researchers receive Distinguished University Innovator AwardThe Michigan Daily profiles Professors David Blaauw and Dennis Sylvester, who are this year’s recipients of the 2019 Distinguished University Innovator Award.
Blaauw, Sylvester are 2019 Distinguished University Innovators
Pioneering computer technology that is spurring innovation and disruption across industries has earned David Blaauw and Dennis Sylvester, professors of electrical engineering and computer science, this year’s Distinguished University Innovator Award.
By Cannibalizing Nearby Stromal Stem Cells, Some Breast Cancer Cells Gain Invasion Advantage
Cancer biologists and engineers collaborated on a device that could help predict the likelihood of breast cancer metastasis.
Blood biopsy: New technique enables detailed genetic analysis of cancer cells
Capturing cancer cells from blood samples offers a non-invasive way to observe whether the cancer is disappearing or whether it is becoming resistant to the treatment.
Biopsy alternative: “Wearable” device captures cancer cells from blood
New device caught more than three times as many cancer cells as conventional blood draw samples.
A new company, Omniscent, is sniffing out dangerous levels of toxic chemicals in the air
Subscription service offers real-time monitoring
Conducting an orchestra of sensor nodes
Keeping time in the Internet of Things with frequency scaling
An even smaller world’s smallest ‘computer’
The latest from IBM and now the University of Michigan is redefining what counts as a computer at the microscale.
Solar cells enable self-powered camera
A solar cell combined with a camera sensor collects photons to provide electricity.
Anonymous alumnus endows award in recognition of EECS professors
The Wise-Najafi Prize for Engineering Excellence in the Miniature World will recognize and incentivize outstanding research and scholarship related to engineering at the meso-scale, micron-scale, nano-scale and beyond.
$7.75M for mapping circuits in the brain
A new NSF Tech Hub will put tools to rapidly advance our understanding of the brain into the hands of neuroscientists.
ECE alum Kukjin Chun earns South Korea’s highest scientific honor
Alumnus Kukjin Chun receives the highest national honor for a Korean scientist and engineer.
‘Sister cell’ profiling aims to shut down cancer metastasis
Michigan engineers release individual cells from a specially-designed chip using laser pulses.
The Michigan Probe: Changing the Course of Brain Research
Some believed early Michigan brain researchers were engaging in “science fiction” – until development of an advanced tool for forging breakthroughs proved them wrong.
Cancer stem cells: new method analyzes 10,000 cells at once
A new tool for making sense of the cells believed to cause cancer relapses and metastases.
Students seek the secrets of the brain in study abroad program
IPAN sent eight undergraduates to Germany for a month of lab work, learning about the intricacies of the brain.
Leaders in neuroscience look to the future
ICAN bring engineers and neuroscientists together to review the recent advancement in neurotechnology and neuroscience, define the need for next-generation tools, and enhance the translation of technology to the scientific community.
Novel collaboration to probe brain activity in unprecedented detail
A pilot program will bring together researchers from different universities to collaborate on advancing research that may lead to a better understanding of the human brain.
Cutting the cost of hearing
MEMStim’s technology is already two phases into pre-clinical testing in preparation for FDA examination. Very few MEMS devices have made it this far.
Muzhi Wang earns a Best Paper Award for a new tunable filter for wireless communication devices
The paper describes a tunable filter for wireless communication modules in the x-band frequency range that uses germanium-telluride phase change switches.
Nader Najafi: A dream that saves lives
Dr. Nader Najafi is now leading the development of some of the most advanced micro-scale medical technology in the world.
What makes cancer cells spread? New device offers clues
Why do some cancer cells break away from a tumor and travel to distant parts of the body? A team of oncologists and engineers from the University of Michigan teamed up to help understand this crucial question.
Student team reaches Qualcomm finals with their proposal for a wearable haptic device
The goal of the project is to augment the transmission of audio and video with the sense of touch.
Khalil Najafi receives 2015 IEEE Daniel E. Noble Award for emerging technologies
The IEEE Daniel E. Noble award is a Technical Field Award, which is among the highest awards given.
Student Spotlight: Tal Nagourney – Exploring navigation
Tal is researching fabrication techniques for a micro rate-integrating gyroscope, using a vacuum mold and blowtorch.
MEMS research by Muzhi Wang recognized at IMS 2014
The paper reports on the design, fabrication, and results of a directly heated phase change RF switch using germanium telluride.
Mina Rais-Zadeh receives 2014 ONR Young Investigator Program (YIP) Award
Rais-Zadeh’s devices are expected to enable sensors for use in harsh environment, high-speed wireless communications, and more.
Student Spotlight: Christopher Boyd – From robotics to MEMS inertial sensors
Chris develops and tests control systems for MEMS inertial sensors, which are used to detect acceleration, tilt, and other attributes related to motion sensing.
Biochips for better cancer therapy
One promising area of cancer treatment is photodynamic therapy, which combines the agents of a photosensitive drug, light, and oxygen.
Babak Parviz: The visionary behind the glass
The inventor of Google Glass is now developing glucose monitoring contact lenses.
Khalil Najafi receives 2013 IEEE Sensors Technical Field Award
Prof. Najafi is a world-recognized leader in the field of integrated sensors, MEMS, and microsystems.
Research Spotlight: Better miniaturized vacuum pumps for electronics and sensors
The three microdevices created at Michigan are each particularly suited to specific applications.
When GPS fails, this speck of an electronic device could step in
The research group developed special fabrication processes that allows them to stack and bond seven different devices in layers.
Neural Probe Research recognized with Best Paper Award at 2013 Transducers Conference
“We present a novel strategy to scale up the number of electrodes with minimized risk.”
MEMS research recognized with Best Poster Award at 2013 Transducers Conference
This research is targeted at developing a precision master clock for a chip-scale Timing and Inertial Measurement Unit.
Workshop to chart the future of nano and micro manufacturing
“This workshop is a first step toward developing a roadmap for practical innovations in nano/micro-manufacturing.”
James McCullagh receives Best Student Paper Award for research to keep bridges safe
McCullagh is working to develop energy harvesting devices and circuits to power wireless sensor nodes which can monitor bridge health.
Kensall D. Wise: Michigan, MEMS and MicrosystemsThis retrospective of Kensall D. Wise, William G. Dow Distinguished University Professor Emeritus, provides a view of how he built a world-class program in MicroElectroMechanical Systems (MEMS).
Research Spotlight: Sensors and actuators for portable microsystems
Though a number of research challenges remain to realize the potential of microdischarge-based devices, the authors’ work demonstrates their promise.
Wireless Integrated MicroSensing and Systems (WIMS2) in California
The technical topics ranged from wireless and low power circuits, to MEMS, to microfabricated gas chromatographs.
Prof. David Blaauw Elected Fellow of the IEEEProf. Blaauw was a core member of the Michigan team that developed the award-winning circuit known as Razor in 2003.
A minimally-invasive brain implant to translate thoughts into movement
The implant is called the BioBolt, and unlike other neural interface technologies that establish a connection from the brain to an external device such as a computer, it’s minimally invasive and low power.
Most powerful millimeter-scale energy harvester generates electricity from vibrations
The researchers have built a complete system that integrates a high-quality energy-harvesting piezoelectric material with the circuitry that makes the power accessible.
MEMStim takes first prize in the Michigan Business Challenge
MEMStim is committed to improving the standard of patient care in neurostimulation. Congratulations, Angelique!
Ken Wise – Leading a Revolution in MEMS
Wise is recognized as one of the world’s foremost experts in sensor technology as well as a MEMS pioneer and entrepreneur.
WIMS and CUOS among 60 Years of Sensational Research by NSF
The WIMS has impacted health care, environmental monitoring, the national infrastructure while CUOS specializes in ultrafast lasers.
Mini generators make energy from random ambient vibrations
The energy-harvesting devices are highly efficient at providing renewable electrical power from arbitrary, non-periodic vibrations.
Enertia and ABC take 1st and 2nd prizes in the clean energy prize business plan competition
The competition was established by DTE Energy and the University of Michigan to encourage entrepreneurship and the development of clean-energy technologies.
Microsystems research for energy scavenging and power generation
The research has applications in health care, environmental monitoring, security, energy conservation and exploration, and more.