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MEMS and Microsystems

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Graduate-level ECE courses related to this area (click the MM column to see Major area courses)
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This research area encompasses projects on a variety of micromachined sensors and actuators and on integrated microsystems that combine these components. Devices such as micromachined neural probes for implantable prostheses, ultra-miniature low-power pressure sensors for catheters, tactile sensors arrays for fingerprint analysis, infra-red imagers for manufacturing process control, and micro gas chromatography systems for environmental monitoring are some of the past contributions of this program. The scope of the current research efforts encompasses exploration of new materials, new device concepts, new fabrication methods, new interface circuits, and new microsystems.

Specialties

  • Environmental Sensors
  • Implantable Devices
  • MEMS Technology and Packaging
  • Microfluidics and Gas/Chemical
  • Plasma Fabrication and Plasma Based MEMS Devices
  • Power Sources and Energy Harvesting
  • RF MEMS

ECE Faculty

Ethem Erkan Aktakka

Website

David Blaauw

Website

Yu-Chih Chen

Jae Yoong Cho

Parag Deotare

Website

Michael Flynn

Website

Yogesh B. Gianchandani

Website

Guohong He

Mark Kushner

Website

Khalil Najafi

Website

Becky (R.L.) Peterson

Website

Yutao Qin

Kamal Sarabandi

Website

John Seymour

Website

Dennis Sylvester

Website

Jong-Kwan Woo

Euisik Yoon

Website

CSE Faculty

Kevin Fu

Website

Affiliated Faculty

Cynthia Chestek

Website

Katsuo Kurabayashi

Website

Jerome Lynch

Website
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