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MEMS and Microsystems Faculty

This list includes faculty with primary research in MEMS and microsystems, as well as faculty with a primary focus in other areas. Refer to their research interests and websites for additional information.

For those wanting to dive deeper, refer to our Reports and Publications page.

For more information on this research area, visit the MEMS and Microsystems research page.

ECE Faculty

Ethem Erkan Aktakka

Website

David Blaauw

Website

Yu-Chih Chen

Jae Yoong Cho

Parag Deotare

Website

Michael Flynn

Website

Yogesh B. Gianchandani

Website

Guohong He

Mark Kushner

Website

Khalil Najafi

Website

Becky (R.L.) Peterson

Website

Yutao Qin

Kamal Sarabandi

Website

Dennis Sylvester

Website

Jong-Kwan Woo

Euisik Yoon

Website

CSE Faculty

Kevin Fu

Website

Affiliated Faculty

Cynthia Chestek

Website

Katsuo Kurabayashi

Website

Jerome Lynch

Website