Optical MEMS from Micro to Nano Scale
Prof. Ming C. Wu
Professor, Department of Electrical Engineering
Henry Samueli School of Engineering and Applied Science
University of California at Los Angeles
Los Angeles, California
Optical MEMS has entered a new era. With the intensive development in industry in the past few years, many Optical MEMS components such as scanning micromirrors and switches are becoming available commercially. Future opportunities of Optical MEMS lie in the intimate integration of MEMS with guided wave integrated optics and nanoscopic photonic integrated circuits. In this talk, I will describe three examples of Optical MEMS research at UCLA: (1) wavelength-selective switch (WSS) using analog micromirror arrays; (2) MEMS actuated photonic crystal and microresonator circuits; and (3) light actuation of microfluidic systems for biosensing applications.
Ming C. Wu received his B.S. degree in Electrical Engineering from National Taiwan University in 1983, and the M.S. and Ph.D. degrees in Electrical Engineering and Computer Sciences from the University of California, Berkeley in 1985 and 1988, respectively. From 1988 to 1992, he was a Member of Technical Staff at AT&T Bell Laboratories, Murray Hill. In 1993, he joined the faculty of Electrical Engineering Department of UCLA, where he is currently Professor. He is also Director of UCLA’s Nanoelectronics Research Center, and Vice Chair for Industrial Relations. His current research interests include MicroElectroMechanical Systems (MEMS), Optical MEMS (or MOEMS), biophotonics, microwave photonics, and high speed optoelectronics. Dr. Wu was the founding Co-Chair for IEEE LEOS Summer Topical Meeting on Optical MEMS in 1996. The meeting has now evolved into IEEE LEOS International Conference on Optical MEMS that are hosted in Europe, Asia, and U.S. Dr. Wu has also served in program committees of many other conferences, including OFC, CLEO, MEMS, IEDM, DRC, ISSCC, and MWP.
Dr. Wu has published over 340 papers, contributed 4 book chapters, and holds 10 U.S. patents. He is a David and Lucile Packard Foundation Fellow (1992-1997), and an IEEE Fellow.