Creating 2D Nanocatalytic Combustion Pattern using Micro/Nano-fabrication Technology and Its Infrared Thermography Analysis

Director, Institute of NanoMicroEnergy, Shanghai University, Shanghai, China
Director, National Key Laboratory of Science and Technology on Micro/Nano
Fabrication, Shanghai Jiao Tong University, Shanghai, Chi
In recent years, micro-/nano-fabrication technology has expended its applications from manufacturing miniaturized mechanical/electrical systems to serving more complex biological/chemical/medical purposes. There are also increasing efforts of employing micro-/nano-technology to create electrical or mechanical power systems that promoted growing research in power-MEMS/NEMS area. In this paper, we will report our work in design and fabricate chemical energy powered high output MEMS system. Two-dimensional room temperature nanocatalytic combustion has been successfully achieved on a patterned surface forming a "2D-fire" with a thickness in nanometers. Further discussion will be introduced to understand its scientific significances, and more importantly its potential applications of establishing new class energy system.
Additionally, a homemade infrared microscope provides high quality thermal image analysis of "2D-fire" in micrometer scale. After revealing its hardware and software capabilities, we will show more actual measurements from IC chips, MEMS hot plate to cancer optothermal treatment, etc. In order to calibrate the temperature measurement accuracy, we have developed a novel active calibration system basing on a micro-fabricated hot plate.

Dr. Zhiyu (Jerry) Hu (Ph.D. MBA), National Chair Professor of China, is holding a Zi Yuan Chair professorship at Shanghai Jiao Tong University and serving as the director of National Key Laboratory of Science and Technology on Micro-/Nano-Fabrication. He is also the founder and director of the Institute of NanoMicroEnergy of Shanghai University at where he is holding professorships in 12 majors. Dr. Hu is an adjunct professor appointment at University of Tennessee, Knoxville, Tennessee, USA plus other honorary positions in several universities and institutes. He was a research staff member at Oak Ridge National Laboratory (ORNL) of the U.S. Department of Energy. His research interests are in NEMS- and MEMS-based sensors, nanoscale energy conversion, implantable BioMEMS devices and nanocatalytic materials. Dr. Hu is the author of more than eighty publications in peer reviewed journals; several dozens invited talks; eighty plus conference presentations and ten published and pending patents. He is the recipient of many awards that includes Discover Magazine Award, National and Regional Federal Laboratory Consortium awards and several awards from ORNL including The Inventor of the Year Award (2000). Dr. Hu's work generated many press accolades and mentions around the world. He is an active member of MNSC, APS, ASME, ACS, ECS, MRS, IECS and the National Physics Honor Society Sigma Pi Sigma. He is an executive member of Nano Engineering Council of ASME and a committee member of the Sensor Division of ECS.