Advancing Thin-Film Piezoelectric Microsystems: Innovations and Future Directions

The integration of piezoelectric materials with semiconductor microfabrication, first realized about two decades ago, has revolutionized energy transduction at the microscale. Today, smart systems rely on an array of miniaturized, low-power, high-performance sensors and actuators enabled by these materials.

In this talk, Dr. Abdolvand will present thin-film piezoelectric-on-substrate (TPoS) technology as a versatile platform for piezoelectric micro-device implementation. He will highlight key advances in the field and discuss his contributions through past and ongoing research projects. The talk will explore emerging opportunities in piezoelectric microsystems, offering insights into their role in next-generation microelectronics and sensing applications.

BIO 

Dr. Abdolvand is a professor and the department chair in the Department of Electrical and Computer Engineering at the University of Central Florida (UCF). He received his Ph.D. in 2008 from the School of Electrical and Computer Engineering at Georgia Tech after which he joined Oklahoma State University as an assistant professor. His area of research lies in the general field of micro-electro-mechanical systems (MEMS) with a special interest in piezoelectric microsystems. Dr. Abdolvand is credited worldwide to have significantly contributed to the development of a class of micro-devices that he has coined as thin-film piezoelectric-on-substrate (TPoS) resonators. He has authored/co-authored two book chapters and more than 100 articles in his areas of research. Dr. Abdolvand is the inventor on 15 issued US patents disclosing concepts ranging from acoustic micro-devices to micro-fabrication technologies.