EECS 514: Advanced MEMS Devices and Technologies
Instructor: Prof. Yogesh Gianchandani
Prerequisite: EECS 414. (4 credits)
Advanced micro electro mechanical systems (MEMS) devices and technologies. Transduction techniques, including piezoelectric, electrothermal, and resonant techniques. Chemical, gas, and biological sensors, microfluidic and biomedical devices. Micromachining technologies such as laser machining and microdrilling, EDM, materials such as SiC and diamond. Sensor and actuator analysis and design through CAD.