InstructorProfessor Euisik Yoon

This course introduces students to this rapidly emerging, multi-disciplinary, and exciting field of Micro Electro Mechanical Systems (MEMS) in biomedical applications, named “BioMEMS.” The miniaturized systems are capable of performing many tasks and functions involving mechanical, electrical, optical, chemical, bio, fluidic, and other types of signals. In this course, we will focus on MEMS and microsystem technologies that enhance bio-medical research and health care. The aims of the course include to:
(1) review microfabrication technologies in the context of BioMEMS device implementation and innovations; (2) introduce fundamental designs and related technologies of microfluidics, lab-on- chips, biosensors, and implantable biomedical microsystems with an emphasis on the pathway to applications; (3) analyze and optimize microsystems; and (4) brainstorm interesting ideas incorporating BioMEMS with gene sequencing, big data analysis, and implantable/wearable device (class project). 

Albert Folch, Introduction to BioMEMS, CRC Press, 2013 (Optional)
Ellis Meng, Biomedical Microsystems, John Wiley & Sons, Inc., New York, 2011 (Optional)


  • Review of Microfabrication & MEMS Technologies
  • Soft Lithography
  • Microscale Behavior of Fluids
  • Microfluidic Components – Microvalves, Micropumps, Micromixer, and Logic
  • Droplet Microfluidics
  • Cell Assay Chips
  • CTC Chips
  • Chemical and Protein Analysis
  • DNA Analysis and Gene Sequencing 
  • Implantable Biomedical Sensors